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The status of semiconductor materials testing technology

Four needle should be in the same plane with a straight line. Therefore, the sample surface should be smooth. 213 four-probe and the sample should have good ohmic contact. Therefore, the probe should be more pointed, the point of contact with the sample should be hemispherical, so that the radial divergence of the current into (or brought together), and the contact radius should be less than stitches; required degree of tip indentation of the line must be less than 1OOmm, tip should have a certain pressure, and generally 20N appropriate. 214 current through the sample should not lead to changes in the conductivity of the sample. 2_2 per the existing measuring instruments of God, Suzhou Science and Technology Co., Ltd. (Suzhou Telecom Instrument Factory, hereinafter referred to as \Is the first production four-probe instrument unit (original SZ82), is also a four-probe meter in units of national standards. In recent years, a hundred gods technology development based on the actual needs of the solar industry in the development and production on the basis of SX1934 SX1944, SX1934B,[link widoczny dla zalogowanych], SX1934C and can determine the type and heavily doped PN's SX1903 series instruments. Technological production per God's SX1934 (original SZ82 national standard prototype), SXl944, SX1934B and PN discrimination apparatus SX1903 (which can distinguish heavily doped) series of instruments widely used in semiconductor silicon,[link widoczny dla zalogowanych], polycrystalline silicon measurements and judgments. SXI934 the range up. Resistivity of 1O14 ~ 1OQ ・ cm,[link widoczny dla zalogowanych], sheet resistance is 10. 10. Q / port, the resistance of 10-4 to 100, probe spacing of 1mm, the probe for the WC, ① to 05mm, 0-2kg adjustable pressure, maximum pressure of about 2kg more accurate measurement of silicon resistivity. SX1944 SX1934 is based on the research and development, with a computer USB interface to connect the computer to measure. SX1934B is SX1934 simplified instrument, range up to: a resistivity of 10-2N10Q ・ cm,[link widoczny dla zalogowanych], sheet resistance of 10 ~ 1030 / I, resistance to 10-39999Q, mainly used in semiconductor production lines for crude materials challenges. SXI903 is a rectification method using PN detectors, to determine both the characteristics of heavily doped. 2.3 The manufacturer tests the error in the specific adjustments to the thickness of the current adjustment. Resistivity is the resistance per unit thickness unit cross-sectional area, the thickness is extremely important parameter, the resistivity of different materials of different thickness. Correct way to measure the resistivity material thickness is measured before, according to the thickness of a thickness correction factor look-up table, the current through the adjustment factor calculated, then adjusted the current measurement. The product has the task of look-up table and computing software to handle, so the user can simply measured the thickness of the electrical resistivity measurements. The following are examples of measurement error. The first measurement standard; short-tailed bird samples, according to the standard sample are current correction factor to adjust the value, then the current correction coefficient measuring the production of material under test. The error is standard; short-tailed bird samples and production of the thickness of the material to be detected in different thickness, 54 News Hotline (010) 68635203E-mail: cjb3297 @ 263net adjusted according to the standard sample of the current correction factor can not be used to measure the material under test. Such as the standard sample thickness of 1.5mm, the current through the look-up table correction factor calculated as 0.5245, while the tested material thickness 0.6mm,[link widoczny dla zalogowanych], its current correction value should be 02694. If you do not distinguish between the current correction factor for thickness measurement of mixed measurement results will almost double the difference, that is, the introduction of 100% of the error. This will have extremely serious consequences. Therefore, the measurement of resistivity of the material thickness must be clear, the neglect of the pursuit of speed measurement of the thickness of the material will inevitably affect the accuracy. However, the pursuit of accuracy in the sub-premise, it can be tested on a group to estimate the thickness of the material (as with a number of similar thickness), which can achieve the required speed of production efficiency. Understand the principles, you can adjust the thickness clearly more direct than the current adjustment easy. Pay special attention to the temperature measurement of semiconductor materials for very large, standard; short-tailed bird measuring temperature of 23 ℃, if the temperature deviation is large, measurement error will become larger. 3 Conclusion must first sharpen his tools. Outlined above, you can learn on the semiconductor material to be measured, pre-testing of these devices need to understand the principle and scope of practical use in order to better play its role. Union (Zebian: Zhang Guiling) References 1 Sun to build. Semiconductor Testing Metallurgical Industry Press 2GB/T1552-1995 silicon and germanium single crystal four-probe resistance method for determination of vertical Yang ∞ ∞ ∞ ∞ ∞ ∞ Bai Xi-La style, such as extended one by one
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